WHAT IS A RESIDUAL GAS ANALYSER?

Technology2 years ago

Source: WHAT IS A RESIDUAL GAS ANALYSER?

Mass spectrometers and residual gas analyzers (RGAs), sometimes known as partial pressure analyzers, are used to qualitatively identify each distinct gaseous species within a vacuum system. These emission gas analyzer devices work by determining the particle’s ion mass (M) to charge valence (z) ratio (M/z).